By Xu Ma
A Unified precis of the types and Optimization equipment utilized in Computational Lithography
Optical lithography is likely one of the so much difficult components of present built-in circuit production know-how. The semiconductor is depending extra on solution enhancement thoughts (RETs), on the grounds that their implementation doesn't require major adjustments in fabrication infrastructure. Computational Lithography is the 1st ebook to deal with the computational optimization of RETs in optical lithography, delivering an in-depth dialogue of optimum optical proximity correction (OPC), part transferring masks (PSM), and off-axis illumination (OAI) RET instruments that use model-based mathematical optimization approaches.
The ebook begins with an creation to optical lithography structures, electrical magnetic box ideas, and the basics of optimization from a mathematical perspective. It is going directly to describe intimately sorts of optimization algorithms to enforce RETs. many of the algorithms constructed are in accordance with the applying of the OPC, PSM, and OAI techniques and their combos. Algorithms for coherent illumination in addition to partly coherent illumination structures are defined, and diverse simulations are provided to demonstrate the effectiveness of the algorithms. moreover, mathematical derivations of all optimization frameworks are presented.
The accompanying MATLAB® software program records for all of the RET equipment defined within the booklet make it effortless for readers to run and examine the codes for you to comprehend and follow the optimization algorithms, in addition to to layout a collection of optimum lithography mask. The codes can also be utilized by readers for his or her study and improvement actions of their educational or commercial companies. An accompanying MATLAB® software program consultant is additionally incorporated. An accompanying MATLAB® software program advisor is incorporated, and readers can obtain the software program to exploit with the consultant at ftp://ftp.wiley.com/public/sci_tech_med/computational_lithography.
Tailored for either entry-level and skilled readers, Computational Lithography is intended for school, graduate scholars, and researchers, in addition to scientists and engineers in commercial firms whose study or profession box is semiconductor IC fabrication, optical lithography, and RETs. Computational lithography attracts from the wealthy idea of inverse difficulties, optics, optimization, and computational imaging; as such, the ebook is usually directed to researchers and practitioners in those fields.