By David G. Seiler, Alain C. Diebold, Thomas J. Shaffner, Robert McDonald, W. Murray Bullis, Patrick J. Smith, Erik M. Secula
The global semiconductor group faces more and more tough demanding situations because it strikes into the producing of chips with function sizes forthcoming a hundred nm. many of the demanding situations are materials-related, reminiscent of transistors with high-k dielectrics and on-chip interconnects made of copper and low-k dielectrics. The value of those demanding situations calls for distinct recognition from these within the metrology and analytical measurements group. Characterization and metrology are key enablers for constructing semiconductor approach know-how and in enhancing manufacturing.This ebook summarizes significant matters and offers serious stories of significant dimension innovations which are an important to proceed the advances in semiconductor expertise. It covers significant facets of the method know-how and so much characterization innovations for silicon study, together with improvement, production, and diagnostics.It presents a concise and potent portrayal of characterization wishes and a few of the issues that has to be addressed via undefined, academia, and executive to proceed the dramatic development in semiconductor expertise. It additionally presents a foundation for exciting useful views and new rules for examine and improvement.